Demonstration of Hybrid Al$_{x}$ Ga$_{1-x}$As–Polysilicon Microelectromechanical Tunable Filter

Abstract

We report the experimental demonstration of a hybrid AlxGa1-xAs-polysilicon electrostatically actuated microelectromechanical systems (MEMS) tunable filter. An Al0.4Ga0.6As-GaAs distributed Bragg reflector was successfully flip-bonded to a polysilicon MEMS platform using SU-8 photoresist as bonding adhesive. The device demonstrated 53 nm (936.5-989.5 nm) of… (More)

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