Delamination of bonding Interface between benzocyclobutene (BCB) and silicon dioxide/silicon nitride

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@article{Bu2016DelaminationOB, title={Delamination of bonding Interface between benzocyclobutene (BCB) and silicon dioxide/silicon nitride}, author={Fan Bu and Qing Ma and Zheyao Wang}, journal={Microelectronics Reliability}, year={2016}, volume={65}, pages={225-233} }