Defects evaluation system for spherical optical surfaces based on microscopic scattering dark-field imaging method.


In the field of automatic optical inspection, it is imperative to measure the defects on spherical optical surfaces. So a novel spherical surface defect evaluation system is established in this paper to evaluate defects on optical spheres. In order to ensure the microscopic scattering dark-field imaging of optical spheres with different surface shape and… (More)
DOI: 10.1364/AO.55.006162


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