Defect Analysis of Electric and Photonic Double Layer Substrate made by SIMOX 3D sculpting

  • Kazuya Kishima
  • Published 2006 in
    2006 IEEE international SOI Conferencee…


From the viewpoint of electric device fabrication, we examined a SIMOX 3D sculpting method (Koonath, 2003) that three dimensionally integrate electric circuits and photonic circuits on an SOI substrate. We investigated buried optical waveguide structure underneath the silicon surface and defect characteristics on the surface of the substrate made by 8" size… (More)

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