Deep dry-etch of silica in a helicon plasma etcher for optical waveguide fabrication

@inproceedings{Li2005DeepDO,
  title={Deep dry-etch of silica in a helicon plasma etcher for optical waveguide fabrication},
  author={Wen Tao Li and Douglas A. P. Bulla and John D. Love and Barry Luther-Davies and Roderick Boswell},
  year={2005}
}