Decomposition of ethylene oxide in the RF plasma environment.

@article{Liao2001DecompositionOE,
  title={Decomposition of ethylene oxide in the RF plasma environment.},
  author={W T Liao and Won Jun Lee and C. Y. Chen and Minliang Shih},
  journal={Environmental technology},
  year={2001},
  volume={22 2},
  pages={165-73}
}
A radio frequency (RF) plasma system was used to decompose the ethylene oxide (EO) contained gas in the EO/Ar, and EO/O2/Ar system, respectively. The reactants and final products were analyzed by using FTIR (Fourier transform infrared spectroscopy). The effects of plasma operational parameters, including input power wattage (W), total gas flow rate (Q), feeding concentration (C) of EO and operational pressure for EO decomposition were evaluated. Due to the importance of the high-energy… CONTINUE READING

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