Deciphering intermodulation in AlN laterally vibrating resonators

@article{Lu2016DecipheringII,
  title={Deciphering intermodulation in AlN laterally vibrating resonators},
  author={R. Lu and A. Gao and S. Gong},
  journal={2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2016},
  pages={671-674}
}
  • R. Lu, A. Gao, S. Gong
  • Published 2016
  • Materials Science, Engineering
  • 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
  • This paper reports an analytical and quantitative method that, for the first time, precisely predicts the third-order intermodulation distortion (IMD3) in AlN laterally vibrating resonators (LVRs). The simulated IMD3 reaches an excellent agreement with the measurements for a fabricated 453.4 MHz AlN LVR. This method provides an unprecedented framework for enhancing the power handling and reducing the nonlinearity of AlN LVRs to meet the requirements of RF front-end filtering. 
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