Data mining for yield enhancement in semiconductor manufacturing and an empirical study

@article{Chien2007DataMF,
  title={Data mining for yield enhancement in semiconductor manufacturing and an empirical study},
  author={Chen-Fu Chien and Wen-Chih Wang and Jen-Chieh Cheng},
  journal={Expert Syst. Appl.},
  year={2007},
  volume={33},
  pages={192-198}
}
During wafer fabrication, process data, equipment data, and lot history will be automatically or semi-automatically recorded and accumulated in database for monitoring the process, diagnosing faults, and managing manufacturing. However, in high-tech industry such as semiconductor manufacturing, many factors that are interrelated affect the yield of fabricated wafers. Engineers who rely on personal domain knowledge cannot find possible root causes of defects rapidly and effectively. This study… CONTINUE READING
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