Damping in 1 GHz laterally-vibrating composite piezoelectric resonators

@article{SegoviaFernandez2015DampingI1,
  title={Damping in 1 GHz laterally-vibrating composite piezoelectric resonators},
  author={Jeronimo Segovia-Fernandez and Gianluca Piazza},
  journal={2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2015},
  pages={1000-1003}
}
This paper focuses on experimentally verifying the physics of damping in 1 GHz laterally-vibrating composite piezoelectric resonators. This work confutes a previously developed theory of interfacial dissipation, a slip phenomenon occurring at the interface between dissimilar materials, which associated damping to a stress jump (or difference in Young's moduli (ΔE)) of the materials forming the interface. This work finds that damping in 1 GHz laterally-vibrating AlN resonators could be… CONTINUE READING

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