Damping and Tracking Control Schemes for Nanopositioning

@article{Eielsen2014DampingAT,
  title={Damping and Tracking Control Schemes for Nanopositioning},
  author={Arnfinn Aas Eielsen and Marialena Vagia and Jan Tommy Gravdahl and Kristin Ytterstad Pettersen},
  journal={IEEE/ASME Transactions on Mechatronics},
  year={2014},
  volume={19},
  pages={432-444}
}
Fast and accurate tracking of reference trajectories is highly desirable in many nanopositioning applications, including scanning probe microscopy. Performance in common positioning stage designs is limited by the presence of lightly damped resonances and actuator nonlinearities such as hysteresis and creep. To improve the tracking performance in such systems, several damping and tracking control schemes have been presented in the literature. In this paper, six different control schemes are… CONTINUE READING

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