Damage formation in GaN under medium energy range implantation of rare earth ions: a combined TEM, XRD and RBS/C investigation

@inproceedings{Lacroix2011DamageFI,
  title={Damage formation in GaN under medium energy range implantation of rare earth ions: a combined TEM, XRD and RBS/C investigation},
  author={Bertrand Lacroix and S{\'e}bastien Leclerc and Pierre Canisius Ruterana and Alain Decl{\'e}my and S. M. C. Miranda and Katharina Lorenz and E. Alves},
  year={2011}
}