Cut Redistribution With Directed-Self-Assembly Templates for Advanced 1-D Gridded Layouts

@article{Lin2016CutRW,
  title={Cut Redistribution With Directed-Self-Assembly Templates for Advanced 1-D Gridded Layouts},
  author={Zhi-Wen Lin and Yao-Wen Chang},
  journal={2016 21st Asia and South Pacific Design Automation Conference (ASP-DAC)},
  year={2016},
  pages={89-94}
}
Directed-self-assembly (DSA) technology is a promising candidate for cut printing in sub-10nm 1-D gridded designs, where cuts might need to be redistributed such that they could be patterned by DSA guiding templates. In this paper, we first propose a linear-time optimal dynamic-programming-based algorithm for a special case of the template guided cut redistribution problem, where there is at most one dummy wire segment on a track. We then extend our algorithm to general cases by applying a… CONTINUE READING

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