# Curve evolution models for real-time identification with application to plasma etching

@article{Berg1999CurveEM, title={Curve evolution models for real-time identification with application to plasma etching}, author={Jordan M. Berg and Anthony J. Yezzi and Allen R. Tannenbaum}, journal={IEEE Trans. Autom. Control.}, year={1999}, volume={44}, pages={99-102} }

It is desirable, in constructing an algorithm for real-time control or identification of free surfaces, to avoid representations of the surface requiring mesh refinement at corners or special logic for topological transitions. Level set methods provide a promising framework for such algorithms. In this paper we present: 1) a mathematical representation of free surface motion that is particularly well-suited to real-time implementation; 2) a technique for estimating an isotropic and homogeneous…

## 9 Citations

### Estimation of parameter values appearing in space and orientation dependent curve evolution process models

- MathematicsProceedings of the 1999 American Control Conference (Cat. No. 99CH36251)
- 1999

Level sets are a robust and flexible mathematical framework for the representation of evolving curves and surfaces. The heart of the level set approach is a "speed function" that models the physical…

### Estimation of parameters appearing in the level set evolution equation

- MathematicsProceedings of the 37th IEEE Conference on Decision and Control (Cat. No.98CH36171)
- 1998

Level sets are a robust and flexible mathematical framework for the representation of evolving curves and surfaces. At the heart of the level set approach is the PDE governing the evolution of the…

### Shape-based optimization of a plasma etching process

- PhysicsProceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187)
- 2000

This paper considers the problem of determining a finite number of discrete parameters appearing in a nonlinear partial differential equation describing a curve evolution process. The method is…

### On parameter estimation using level sets [plasma etching]

- MathematicsProceedings of the 1998 American Control Conference. ACC (IEEE Cat. No.98CH36207)
- 1998

A parameter estimation scheme that exploits the level set formulation; the method is completely geometric; there is no need to introduce an arbitrary coordinate system for the curves.

### Shape-based optimal estimation and design of curve evolution processes with application to plasma etching

- PhysicsIEEE Trans. Autom. Control.
- 2001

The paper presents optimal estimation and design techniques based on analytical gradient computations for a class of position and orientation dependent speed functions and demonstrates the technique on a plasma etching model taken from the literature.

### On Parameter Estimation Using Level Sets

- Computer Science, Mathematics
- 1999

A parameter estimation scheme that exploits the level set formulation; the method is completely geometric; there is no need to introduce an arbitrary coordinate system for the curves.

### On Parameter Estimation Using Level

- Mathematics, Computer Science
- 1998

A parameter estimation scheme that exploits the level set formulation; the method is completely geometric; there is no need to introduce an arbitrary coordinate system for the curves.

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