Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO<inf>2</inf> from a Cu capped Co-C layer

Abstract

To improve the crystallinity of multilayer graphene (MLG) directly deposited on SiO<inf>2</inf> for interconnect applications, a new solid phase precipitation (SPP) process involving current stress is investigated. It is found that the MLG crystallinity precipitated from a Cu capped Co-C layer can be improved by the vertical current to the Cu/Co-C but not… (More)

Cite this paper

@article{Ichikawa2017CurrentES, title={Current enhanced solid phase precipitation (CE-SPP) for direct deposition of multilayer graphene on SiO2 from a Cu capped Co-C layer}, author={Hiroyasu Ichikawa and Kazuyoshi Ueno}, journal={2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)}, year={2017}, pages={244-246} }