Current Scaling in Aligned Carbon Nanotube Array Transistors With Local Bottom Gating


A local-bottom-gate (LBG) configuration is introduced for carbon nanotube array field-effect transistors (FETs) (CNTFETs). CNTFETs from highly aligned nanotubes are demonstrated and exhibit the best performance to date, with current density > 40 μA/μm (with no metallic nanotubes), inverse subthreshold slope of 70 mV/decade, and on/off -current ratio > 105… (More)

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