Cu BEOL compatible selector with high selectivity (>107), extremely low off-current (∼pA) and high endurance (>1010)

@article{Luo2015CuBC,
  title={Cu BEOL compatible selector with high selectivity (>107), extremely low off-current (∼pA) and high endurance (>1010)},
  author={Qing Luo and Xiaoxin Xu and Hongtao Liu and Hangbing Lv and Tiancheng Gong and Shibing Long and Qi Liu and Haitao Sun and Writam Banerjee and Nianduan Lu and Ming Liu},
  journal={2015 IEEE International Electron Devices Meeting (IEDM)},
  year={2015},
  pages={10.4.1-10.4.4}
}
Selector with high nonlinearity and low leakage current is critical to solve the sneaking current issue in crossbar memory array. In this work, we present a high performance Cu BEOL compatible threshold switching (TS) selector with several outstanding features, such as high nonlinearity (~107), ultra-low off-state leakage current (~pA), robust endurance (> 1010), and sufficient on-state current density (~1 MA/cm2). The observed threshold switching is resulted from the spontaneously rupture of… CONTINUE READING

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