Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators

@article{Ghaffari2013CrystallographicEI,
  title={Crystallographic effects in modeling fundamental behavior of MEMS silicon resonators},
  author={Shirin Ghaffari and Chae H. Ahn and Eldwin J. Ng and Shasha Wang and Thomas W. Kenny},
  journal={Microelectronics Journal},
  year={2013},
  volume={44},
  pages={586-591}
}
Abstract This paper presents the effects of silicon crystal properties on fundamental behavior of MEMS resonators. MEMS resonators are commonly built from single crystal silicon with proven long-term stability. Frequency and quality factor ( Q ) of silicon resonators, however, depend on the silicon crystal orientation and its interplay with the resonance mode. It is experimentally shown that Q of resonators can vary up to 25% with change in crystal orientation. Anisotropy also causes a split in… CONTINUE READING

Results and Topics from this paper.

Key Quantitative Results

  • It is experimentally shown that Q of resonators can vary up to 25% with change in crystal orientation.