Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators

@article{Zhu2013CrystallographicAE,
  title={Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators},
  author={Haoshen Zhu and Guangcun Shan and Cheng Tu and Joshua En-Yuan Lee},
  journal={2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2013},
  pages={761-764}
}
This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both… CONTINUE READING