Crystal Orientation Dependence and Anisotropic Properties of Macropore Formation of p- and n-Type Silicon

  title={Crystal Orientation Dependence and Anisotropic Properties of Macropore Formation of p- and n-Type Silicon},
  author={M. Christophersen and Juergen Carstensen and Silke R{\"o}nnebeck and Ch. J{\"a}ger and Wolfgang J{\"a}ger and Helmut Prof. Dr. F{\"o}ll},
  journal={Journal of The Electrochemical Society},
The dependence of macropore morphology on the orientation of p- and n-type silicon samples was studied for various organic and aqueous electrolytes containing hydrofluoric acid. Scanning electron microscopy was used studying the morphology of the maeropores. The results show that the macropore formation in p- and n-type silicon is a strongly anisotropic process. Depending maeropores. The results show that the macropore formation in p- and n-type silicon is a strongly anisotropic process… 

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