Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

Abstract

A new target system based on a continuous cryogenic liquid jet for debris-free laser-plasma soft x-ray generation is described. The system is experimentally evaluated with liquid nitrogen as target material. With this target the photon flux is 4.5310 photons/~sr3pulse! from the l52.88 nm N VI line. Brightness and stability are also investigated for this table-top soft x-ray microscope source. The possibility to utilize other cryogenic liquids such as neon, argon, and xenon and, thus, making the system interesting for short-wavelength lithography applications, is also discussed. © 1998 American Institute of Physics. @S0034-6748~98!02506-4#

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Cite this paper

@inproceedings{Berglund1998CryogenicLT, title={Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation}, author={Mikael Berglund and Hans. M. Hertz and Th Wilhein}, year={1998} }