Creating multi-layered structures with freestanding parts in SU-8

@inproceedings{Ceyssens2005CreatingMS,
  title={Creating multi-layered structures with freestanding parts in SU-8},
  author={Frederik Ceyssens and Robert Puers},
  year={2005}
}
  • Frederik Ceyssens, Robert Puers
  • Published 2005
  • Computer Science, Materials Science
  • This paper reports on a new method to create multi-layered structures with freestanding parts in SU-8. Examples of such structures are beams partially resting on a post or microchannels. The method, based on high-absorption UV light with a wavelength of 313 nm in SU-8, is fast, uses only traditional micromachining equipment and requires very few processing steps. It is well suited for thin freestanding layers (<15 µm). Furthermore, a variant of a method that uses a built-in UV blocking layer to… CONTINUE READING

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