Coupled Mesoscale — Continuum Simulations of Copper Electrodeposition in a Trench

Abstract

Copper electrodeposition in submicron trenches involves phenomena that span many orders of magnitude in time and length scales. In the present work, two codes that simulate electrochemical phenomena on different time and length scales were externally linked. A Monte Carlo code simulated surface phenomena in order to resolve surface roughness evolution and… (More)

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