• Corpus ID: 245704675

Coulomb actuated microbeams: A Chebyshev-Edgeworth approach to highly efficient lumped parameter models

  title={Coulomb actuated microbeams: A Chebyshev-Edgeworth approach to highly efficient lumped parameter models},
  author={Hermann A. G. Schenk and Anton Melnikov and Franziska Wall and Matthieu Gaudet and Michael Stolz and David Schuffenhauer and Bert Kaiser},
lumped parameter models Hermann A. G. Schenk, a) Anton Melnikov, Franziska Wall, Matthieu Gaudet, Michael Stolz, 4 David Schuffenhauer, and Bert Kaiser Arioso Systems GmbH, Dresden, 01109 Germany Fraunhofer Institute for Photonic Microsystems IPMS, 01109 Dresden, Germany Universität Oldenburg, Department für Informatik AMiR, 26111 Oldenburg, Germany Brandenburg University of Technology Cottbus-Senftenberg, 03046 Cottbus, Germany 
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