Correction of Aberrations—Past, Present and Future

Abstract

The performance of static rotationally symmetric electron lenses is limited by unavoidable chromatic and spherical aberrations. In 1936, Scherzer demonstrated that the integrands of the integral expressions for the coefficients of these aberrations can be written as a sum of positive quadratic terms [1]. Hence these coefficients can never change sign. This… (More)

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Cite this paper

@inproceedings{Ros2002CorrectionOA, title={Correction of Aberrations—Past, Present and Future}, author={Helge Ros{\'e}}, year={2002} }