Copper interconnect technology for the 22 nm node

  title={Copper interconnect technology for the 22 nm node},
  author={J. P. Gambino},
  journal={Proceedings of 2011 International Symposium on VLSI Technology, Systems and Applications},
  • J. P. Gambino
  • Published 2011 in
    Proceedings of 2011 International Symposium on…
On-chip copper interconnects have gained wide acceptance in the microelectronics industry due to improved resistivity and reliability compared to Al interconnects [1]. Initially, copper interconnects were only used for high performance logic circuits. However, Cu interconnects are now used in a wide variety of integrated circuits, including dynamic random access memories (DRAM) [2], RF circuits [3], and CMOS image sensors [4]. Copper interconnects will continue to be used for the 32 and 22nm… CONTINUE READING
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