Copper , Silver , and Gold Etching with H 2 and Ch 4 Based Plasmas

@inproceedings{Hess2014CopperS,
  title={Copper , Silver , and Gold Etching with H 2 and Ch 4 Based Plasmas},
  author={Dennis W. Hess and Pradeep Kumar Agrawal},
  year={2014}
}