Converting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheres

  title={Converting Ceria Polyhedral Nanoparticles into Single-Crystal Nanospheres},
  author={Xiangdong Feng and Dean C. Sayle and Zhong Lin Wang and M Sharon Paras and Brian P. Santora and Anthony C. Sutorik and Thi X. T. Sayle and Yi Yang and Yong Ding and Xudong Wang and Y. S. Her},
  pages={1504 - 1508}
Ceria nanoparticles are one of the key abrasive materials for chemical-mechanical planarization of advanced integrated circuits. However, ceria nanoparticles synthesized by existing techniques are irregularly faceted, and they scratch the silicon wafers and increase defect concentrations. We developed an approach for large-scale synthesis of single-crystal ceria nanospheres that can reduce the polishing defects by 80% and increase the silica removal rate by 50%, facilitating precise and… 

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