Convergent beam electron diffraction extinction distance measurements for quantitative analysis of si(1-x),Ge(x).

@article{Delille2002ConvergentBE,
  title={Convergent beam electron diffraction extinction distance measurements for quantitative analysis of si(1-x),Ge(x).},
  author={D. Delille and R. Pantel and Gr{\'e}gory Vincent and Eric Van Cappellen},
  journal={Ultramicroscopy},
  year={2002},
  volume={93 1},
  pages={1-9}
}
A new method to determine the concentration of germanium in Si(1-x) Ge(x) single crystals is presented. It is based on extinction distance measurements by means of convergent beam electron diffraction (CBED). The two-beam condition CBED intensity oscillation (the so-called rocking curve) is measured for the 004 diffracted beam and compared with a numerical simulation. Using the two-beam dynamical diffraction approximation theory, this approach yields very precise values for both specimen… CONTINUE READING