Controlling the duty cycle of holographic crossed gratings by in situ endpoint detection during development.

Abstract

A method of in situ development endpoint detection is proposed to control the duty cycle of holographic crossed gratings. Based on the observation that after the developer first touches the substrate surface the topography of the crossed grating undergoes an evolution process from a hole array of increasing diameter to a pillar array of decreasing diameter… (More)
DOI: 10.1364/AO.55.002657

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