Controlled positive and negative surface charge injection and erasure in a GaAs/AlGaAs based microdevice by scanning probe microscopy.

Abstract

In this paper, we show that positive and negative charges can be injected into the surface of SiO(2)/Si(3)N(4)/SiO(2)/GaAs/AlGaAs heterostructure material by using a biased tip of a scanning probe microscope. Furthermore, the injected charges can be erased with the same tip once grounded, working in slow scan and contact mode. Surface potential measurements… (More)
DOI: 10.1088/0957-4484/19/04/045304

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