Control of a multi-axis platform for metrological purposes using differential flatness

@article{RodriguezFortun2011ControlOA,
  title={Control of a multi-axis platform for metrological purposes using differential flatness},
  author={Jose Manuel Rodriguez-Fortun and Javier Orus and J. Alfonso and F. Rotella and J. A. Castellanos},
  journal={IEEE Conference on Decision and Control and European Control Conference},
  year={2011},
  pages={1633-1638}
}
Positioning and tracking devices with micrometer range and sub-micrometer resolution are becoming of special interest in recent years for an extending range of applications including metrological devices, manipulators and mechanization systems both in research and high precision industries (for example, semiconductors). The control of these systems is not an easy task because of its normally high stiffness and the coupling existing between the different degrees of freedom. The present work… CONTINUE READING

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