Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing

@article{Rakotondrabe2014ControlOA,
  title={Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing},
  author={Micky Rakotondrabe and Anthony G. Fowler and S. O. Reza Moheimani},
  journal={IEEE Transactions on Control Systems Technology},
  year={2014},
  volume={22},
  pages={1486-1497}
}
This paper presents the full characterization, modeling, and control of a 2-degrees-of-freedom microelectromechanical systems (MEMS) nanopositioner with fully integrated electrothermal actuators and sensors. Made from nickel Z-shaped beams, the actuators are able to move the device's stage in positive and negative directions (contrary to classical V-shaped electrothermal actuators) and along two axes (x and y). The integrated electrothermal sensors are based on polysilicon resistors, which are… CONTINUE READING
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