Control of a MEMS optical switch

@article{Borovic2004ControlOA,
  title={Control of a MEMS optical switch},
  author={Bruno Borovic and C. Hong and A. Q. Liu and Li Xie and F. Lewis},
  journal={2004 43rd IEEE Conference on Decision and Control (CDC) (IEEE Cat. No.04CH37601)},
  year={2004},
  volume={3},
  pages={3039-3044 Vol.3}
}
An analysis is performed of a MEMS optical switch to determine a dynamical model containing electrical, mechanical, and optical components. The model is compared to experimental results and shows a good match, aside from the damping term which is difficult to analyze. Improved parameters are determined by system identification from the actual experimental data. The improved model is used to design a controller that has two parts, a feedforward part and a feedback part. The feedforward portion… CONTINUE READING
Highly Cited
This paper has 20 citations. REVIEW CITATIONS