Contactless wafer-level TSV connectivity testing method using magnetic coupling

With the advent of 3D-IC, Through Silicon Via (TSV) has been highlighted as the key technology for compactly integrating dies of various functions. However, due to the instability in the TSV fabrication process, various types of failure can be resulted, resulting in drastic decrease in the final chip yield with the increase in the number of TSVs and stacked… CONTINUE READING