Computer modelling of the hollow cathode plasma used for nitriding process

Abstract

A hollow cathode discharge used for ion nitriding of metallic surfaces was studied in terms of fluid modeling. The setup consists of powered anode, grounded cathode and a grid screen placed at a short distance from the cathode. The discharge operated in argon at a pressure of 100 to 400 Pa. The fluid model includes the continuity equations for mean electron… (More)

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