Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams

  title={Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams},
  author={Edward K. Chan and Krishna Garikipati and Robert W. Dutton},
  journal={IEEE Design & Test of Computers},
Abstract The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically actuated beams is calibrated to a wide range of electrical and optical measurements of test structures, and is then used to predict the behavior of more complex dual-bias… CONTINUE READING

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Showing 1-10 of 10 references

ABAQUS/Standard User's Manual, version 5

  • Karlsson Hibbitt, Inc Sorensen
  • ABAQUS/Standard User's Manual, version 5
  • 1996
Highly Influential
8 Excerpts

Measurements of the effect of specimen size on Young's modulus and tensile strength of polysilicon

  • W N Sharpe, Jr, K Turner, R L Edwards
  • Late News Poster Session Supplemental Digest of…
  • 1998
2 Excerpts

Proceedings of the IEEE, Special Issue: Integrated Sensors, Microactuators, and Microsystems (MEMS)

  • Proceedings of the IEEE, Special Issue…
  • 1998
1 Excerpt

Utilizing existing TCAD simulation tools to create solid models for the simulation-based design of MEMS devices

  • M Wilson, R W Dutton, P M Pinsky
  • Proceedings of ASME International Mechanical…
  • 1998

SmartMUMPs Design Handbook including MUMPs Introduction and Design Rules (rev. 4), Microelectronics Center of North Carolina

  • D A Koester, R Mahadevan, A Shishkoff, K W Markus
  • SmartMUMPs Design Handbook including MUMPs…
  • 1996
1 Excerpt

Post-buckling of micromachined beams

  • W Fang, J A Wickert
  • Journal of Micromechanics and Microengineering
  • 1994
2 Excerpts

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

  • T P Weihs, S Hong, J C Bravman, W D Nix
  • Journal of Materials Research
  • 1988
1 Excerpt

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