Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams

@article{Chan1999ComprehensiveSC,
  title={Comprehensive Static Characterization of Vertical Electrostatically Actuated Polysilicon Beams},
  author={Edward K. Chan and Krishna Garikipati and Robert W. Dutton},
  journal={IEEE Design & Test of Computers},
  year={1999},
  volume={16},
  pages={58-65}
}
Abstract The entire process of calibrating an electromechanical simulator – identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device – is presented. The simulation model for electrostatically actuated beams is calibrated to a wide range of electrical and optical measurements of test structures, and is then used to predict the behavior of more complex dual-bias… CONTINUE READING

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