Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target

  title={Compositional dependence of epitaxial Tin+1SiCn MAX-phase thin films grown from a Ti3SiC2 compound target},
  author={Martin Magnuson and Lina Tengdelius and Grzegorz Greczynski and Fredrik Eriksson and Jens H. Jensen and Jun Lu and Mattias Samuelsson and Per Eklund and Lars Hultman and Hans H{\"o}gberg},
  journal={Journal of Vacuum Science \& Technology A},
The authors investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 °C as well as the influence of the sputtering power at 850 °C fo ... 

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