Composition Optimization and Phase Transformation of Si-Nanocrystal-Doped $\hbox{SiO}_{x}$ for Enhancing Luminescence From MOSLED

@article{Pai2009CompositionOA,
  title={Composition Optimization and Phase Transformation of Si-Nanocrystal-Doped \$\hbox\{SiO\}_\{x\}\$ for Enhancing Luminescence From MOSLED},
  author={Y. Y. Pai and Chung-Hsiang Chang and Gong-Ru Lin},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2009},
  volume={15},
  pages={1387-1392}
}
Near-infrared (NIR) photo- and electroluminescence (PL and EL) of Si nanocrystals buried in Si-rich SiO<sub>x</sub>, film, and their correlation with the structural phase transformation and the varied oxygen composition of SiO<sub>x</sub>, are investigated. By detuning the N<sub>2</sub>O flowing ratio (Y<sub>N</sub> <sub>2</sub> <sub>O</sub> = [N<sub>2</sub>O/(N<sub>2</sub>O + SiH<sub>4</sub>)] times 100%) from 93% to 80% during plasma-enhanced chemical vapor deposition growth, the oxygen… CONTINUE READING

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