Compensation of phase change on reflection in white-light interferometry for step height measurement.

@article{Park2001CompensationOP,
  title={Compensation of phase change on reflection in white-light interferometry for step height measurement.},
  author={Min Chul Park and Sung W. Kim},
  journal={Optics letters},
  year={2001},
  volume={26 7},
  pages={420-2}
}
We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi… CONTINUE READING