Comparison of microtweezers based on three lateral thermal actuator configurations

  title={Comparison of microtweezers based on three lateral thermal actuator configurations},
  author={J. K. Luo and Andrew J. Flewitt and S.M. Spearing and Norman A. Fleck and W. I. Milne},
  journal={Journal of Micromechanics and Microengineering},
  pages={1294 - 1302}
Thermal actuator-based microtweezers with three different driving configurations have been designed, fabricated and characterized. Finite element analysis has been used to model the device performance. It was found that one configuration of microtweezer, based on two lateral bimorph thermal actuators, has a small displacement (tip opening of the tweezers) and a very limited operating power range. An alternative configuration consisting of two horizontal hot bars with separated beams as the arms… 

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