Comparison of VO<inf>2</inf> thin films deposited by pulsed laser, electron-beam and sputter deposition

Abstract

The optical performance and morphology of VO<sub>2</sub> thins films deposited by electron beam evaporation, rf magnetron sputtering and pulsed laser deposition are compared. Laser-deposited films are strongly affected by substrate dewetting and epitaxial mismatch.

2 Figures and Tables

Cite this paper

@article{Marvel2014ComparisonOV, title={Comparison of VO2 thin films deposited by pulsed laser, electron-beam and sputter deposition}, author={R. E. Marvel and R. R. Harl and B. R. Rogers and R. F. Haglund}, journal={2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications}, year={2014}, pages={1-2} }