Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches

  title={Comparison of Au and Au–Ni Alloys as Contact Materials for MEMS Switches},
  author={Zhenyin Yang and D. J. Lichtenwalner and A L Morris and Jacqueline Krim and A. I. Kingon},
  journal={Journal of Microelectromechanical Systems},
This paper reports on a comparison of gold and gold-nickel alloys as contact materials for microelectromechanical systems (MEMS) switches. Pure gold is commonly used as the contact material in low-force metal-contact MEMS switches. The top two failure mechanisms of these switches are wear and stiction, which may be related to the material softness and the relatively high surface adhesion, respectively. Alloying gold with another metal introduces new processing options to strengthen the material… CONTINUE READING
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