Comparison of 60Co Response and 10 KeV X-Ray Response in MOS Capacitors

  title={Comparison of 60Co Response and 10 KeV X-Ray Response in MOS Capacitors},
  author={Timothy R. Oldham and James M. McGarrity},
  journal={IEEE Transactions on Nuclear Science},
Recently there has been great practical interest in using low energy (10 keV) x-rays rather than the usual 60Co for radiation testing of microelectronic circuits. In this work we examine some of the mechanisms underlying the radiation response of MOS capacitors in these two environments. Specifically we measure the thickness dependent dose enhancement in thin SiO2 films, and we measure the field dependence of the recombination. We found significant dose enhancement for 10 keV x-rays for thin… CONTINUE READING
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