Because of the significantly-increasing work-function variation (WFV) in high-k/metal-gate technology in sub-30-nm nodes, a simple but reasonable model for quantitatively estimating the WFV is currently required. In this study, a Monte Carlo simulation for statistically generating the grain sizes following two different probability distributions (ie… (More)

@article{Nam2013ComparativeSI,
title={Comparative study in work-function variation: Gaussian vs. Rayleigh distribution for grain size},
author={Hyohyun Nam and Changhwan Shin},
journal={IEICE Electronic Express},
year={2013},
volume={10},
pages={20130109}
}