Comparative study in work-function variation: Gaussian vs. Rayleigh distribution for grain size

Abstract

Because of the significantly-increasing work-function variation (WFV) in high-k/metal-gate technology in sub-30-nm nodes, a simple but reasonable model for quantitatively estimating the WFV is currently required. In this study, a Monte Carlo simulation for statistically generating the grain sizes following two different probability distributions (ie… (More)
DOI: 10.1587/elex.10.20130109

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@article{Nam2013ComparativeSI, title={Comparative study in work-function variation: Gaussian vs. Rayleigh distribution for grain size}, author={Hyohyun Nam and Changhwan Shin}, journal={IEICE Electronic Express}, year={2013}, volume={10}, pages={20130109} }