Compactly packaged superconducting nanowire single-photon detector with an optical cavity for multichannel system.

  title={Compactly packaged superconducting nanowire single-photon detector with an optical cavity for multichannel system.},
  author={Shigehito Miki and Masanori Takeda and Mikio Fujiwara and Masahide Sasaki and Zhen Wang},
  journal={Optics express},
  volume={17 26},
We developed superconducting nanowire single-photon detectors with an optical cavity (OC-SNSPDs) for multichannel systems. For efficient coupling, the devices were installed in compact fiber-coupled packages after their substrate thickness was reduced from 400 to 45 microm. The measured detection efficiency (DE) measurement at different substrate thicknesses and the estimation of optical coupling efficiency indicated that approximately 98% of the input light beam could be radiated on a 15 x 15… 

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