Combining different modes of high-power ion beam application for creation of metallic and diamond-like coatings

@article{Struts2002CombiningDM,
  title={Combining different modes of high-power ion beam application for creation of metallic and diamond-like coatings},
  author={Vasily K. Struts and Vasily M. Matvienko and Anatoli V. Petrov and Anatoli S. Shlapakovski and Valentina A. Sohoreva and Alexey A. Valyaev},
  journal={2002 14th International Conference on High-Power Particle Beams (BEAMS)},
  year={2002},
  volume={1},
  pages={421-424}
}
Some results of the experiments on thin film deposition using pulsed high-power ion beam (HPIB) are reported. Ti, Nb, Pt, and C films were produced from ablation plasma generated under the action of pulsed HPIB on a surface of ablated materials. We are developing the combined technology that deals with cleaning a substrate surface by HPIB, thin film deposition by HPIB, and the radiation-induced mass transfer of elements of both film and substrate to increase the adhesion. The deposition of the… CONTINUE READING