Combined rf and transport effects in magnetized capacitive discharges

@inproceedings{Carter2006CombinedRA,
  title={Combined rf and transport effects in magnetized capacitive discharges},
  author={Mark D. Carter and P. M. Ryan and Darin Hoffman and W. S. Lee},
  year={2006}
}
Magnetic fields can be used to enhance the performance and operational envelope of rf capacitive discharges for semiconductor processing. Antennas in magnetized experimental fusion devices can experience similar rf processes that lead to surface erosion and degraded antenna performance. Two-dimensional modeling is needed to understand the combined effects of production and transport in these plasmas; however, magnetized plasma is a complicated medium because of tensor rf conductivity… CONTINUE READING