Combinatorial Synthesis of Co/Pd Magnetic Multilayers

Abstract

In this work, a combinatorial approach to the synthesis of magnetic multilayers is explored. Combinatorial libraries of Co/Pd multilayer thin films were prepared using off-axis magnetron sputtering to enable thickness gradients across the wafer-magnetic properties of the multilayers are controlled by the thicknesses of Co and Pd layers in the repeated bi… (More)

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