Closed Loop Micromachined Inertial Sensors with Higher Order Σ ∆-Modulators

  title={Closed Loop Micromachined Inertial Sensors with Higher Order Σ ∆-Modulators},
  author={Michael Kraft and William Redman-White and Mounir Mokhtari},
Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator ( Σ∆M) type control structure. The order of the Σ∆M, and hence the noise shaping properties, is usually limited by the dynamics of the mechanical sensing element and may be insufficient for high performance applications. This paper presents a novel approach suggesting the use of a sigma… CONTINUE READING
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