Closed Loop Micromachined Inertial Sensors with Higher Order Σ ∆-Modulators

@inproceedings{Kraft2000ClosedLM,
  title={Closed Loop Micromachined Inertial Sensors with Higher Order Σ ∆-Modulators},
  author={Michael Kraft and William Redman-White and Mounir Mokhtari},
  year={2000}
}
Micromachined inertial sensors are often incorporated in closed loop force feedback structures; a particularly advantageous approach is based upon the inclusion of the sensing element in a sigma-delta modulator ( Σ∆M) type control structure. The order of the Σ∆M, and hence the noise shaping properties, is usually limited by the dynamics of the mechanical sensing element and may be insufficient for high performance applications. This paper presents a novel approach suggesting the use of a sigma… CONTINUE READING
12 Citations
5 References
Similar Papers

Citations

Publications citing this paper.
Showing 1-10 of 12 extracted citations

References

Publications referenced by this paper.
Showing 1-5 of 5 references

Closed loop silicon accelerometers

  • M. Kraft, C. P. Lewis, T. G. Hesketh
  • IEE Proceedings - Circuits, Devices and Systems,
  • 1998
1 Excerpt

editors) Delta-Sigma Data Converter

  • S. N. Norsworthy, R. Schreier, G. C. Temes
  • 1996
2 Excerpts

Application of electrostatic feedback to critical damping of an integrated silicon accelerometer

  • R. P. van Kampen, M. Vellekoop, P. Sarro, R. F. Wolffenbuttel
  • Sensors and Actuators, A
  • 1994
1 Excerpt

Similar Papers

Loading similar papers…