• Corpus ID: 30883737

Clean-room Technologies for the Mini-environment Age

@inproceedings{Kure2007CleanroomTF,
  title={Clean-room Technologies for the Mini-environment Age},
  author={T. Kure and Hideo Hanaoka and Takumi Sugiura and Shinya Nakagawa},
  year={2007}
}
INTRODUCTION CLEAN-ROOM technologies have changed from whole-area down-flow systems, which make all areas high-cleanliness ones, to “localized” cleaning environments by means of “mini environments”— namely, an enclosed, local clean environment (1),(2) (see Fig. 1). A classic example of this shift is a semiconductor fabrication plant for 300-mm-diameter wafers, where OVERVIEW: To improve quality and production yield of various electronic devices (such as semiconductors, displays, and storage… 

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